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1

Auger Spectrometers: A Tutorial Review

NARUMAND, DAVID H., CHILDS, KENTON D.

Journal:

Applied Spectroscopy Reviews

Year:

2004

Language:

english

File:

PDF, 667 KB

english, 2004

2

Mass-fabricated one-dimensional silicon nanogaps for hybrid organic/nanoparticle arrays

Howell, Stephen W, Dirk, Shawn M, Childs, Kenton, Pang, Harry, Blain, Matthew, Simonson, Robert J, Tour, James M, Wheeler, David R

Journal:

Year:

2005

Language:

english

File:

PDF, 664 KB

english, 2005

3

Novel one-dimensional nanogap created with standard optical lithography and evaporation procedures

Dirk, Shawn M, Howell, Stephen W, Zmuda, Sherry, Childs, Kenton, Blain, Matthew, Simonson, Robert J, Wheeler, David R

Journal:

Year:

2005

Language:

english

File:

PDF, 376 KB

english, 2005

4

SPIE Proceedings [SPIE SPIE's 1996 International Symposium on Microlithography - Santa Clara, CA (Sunday 10 March 1996)] Metrology, Inspection, and Process Control for Microlithography X - Sub-0.25-um defect analysis on 200-mm semiconductor wafers

Childs, Kenton D., Paul, Dennis F., Clough, Stephen P., Jones, Susan K.

Year:

1996

Language:

english

File:

PDF, 528 KB

english, 1996

5

SPIE Proceedings [SPIE Design, Process Integration, and Characterization for Microelectronics - Santa Clara, CA (Wednesday 6 March 2002)] Design, Process Integration, and Characterization for Microelectronics - Submicron particle identification by compositional defect review using Auger analysis

Childs, Kenton D., Paul, Dennis F., Morohashi, Tomohiko, Clough, Stephen P., Starikov, Alexander, Tobin, Jr., Kenneth W.

Year:

2002

Language:

english

File:

PDF, 1.68 MB

english, 2002

6

[AIP The 2000 international conference on characterization and metrology for ULSI technology - Gaithersburg, Maryland (USA) (26-29 June 2000)] AIP Conference Proceedings - Defect identification by compositional defect review using auger electron spectroscopy

Childs, Kenton D.

Year:

2001

Language:

english

File:

PDF, 13.77 MB

english, 2001

7

[ASCE CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY - Gaithersburg, Maryland (USA) (23-27 March 1998)] The 1998 international conference on characterization and metrology for ULSI technology - Analysis of submicron defects using an SEM-Auger defect review tool

Childs, Kenton D., Watson, David G., Paul, Dennis F., Clough, Stephen P.

Year:

1998

Language:

english

File:

PDF, 675 KB

english, 1998